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 Silicon Piezoresistive Relative Pressure Sensor
Features Low pressure and temperature hysteresis Fast response High sensitivity and linearity Fatigue free monocrystaline silicon diaphragm giving high load cycle stability * High long term stability * Built in silicon temperature sensor * Media compatible stainless housing * * * *
KPY 51-R KPY 56-R
Stainless Steel Package
Type and Marking KPY 51 R KPY 52 R KPY 53 R KPY 54 R KPY 55 R KPY 56 R Pin Configuration 1 2 3 4 5 6 7 8
Symbol
Pressure Range 0 ... 0.25 0 ... 0.6 0 ... 1.6 0...4 0 ... 10 0 ... 25
Unit bar
Ordering Code Q62705-K174 Q62705-K171 Q62705-K176 Q62705-K178 Q62705-K180 Q62705-K182
P0 ... PN
Capillary tube + VIN - VOUT Temperature sensor (typ. R25 = 2 k) Temperature sensor - VIN + VOUT Not connected
Semiconductor Group
1
02.97
KPY 51-R KPY 56-R
Absolute Maximum Ratings Parameter Pressure overload KPY 51 R KPY 52 R KPY 53 R KPY 54 R KPY 55 R KPY 56 R Operating temperature range Storage temperature range Supply voltage Symbol Limit Values1) Frontside Rearside Unit bar 2 6 10 16 30 75 2 6 10 16 30 40 - 40 ... + 125 - 50 ... + 130 12 C C V
PMAX
TA Tstg VIN
1) Frontside coupling applies pressure onto chip face. Rearside coupling applies pressure through Kovar centre tube.
Electrical Characteristics at TA = 25 C and VIN = 5 V, unless otherwise specified. Parameter Bridge resistance Sensitivity KPY 51 R KPY 52 R KPY 53 R KPY 54 R KPY 55 R KPY 56 R Output voltage KPY 51 R KPY 52 R KPY 53 R KPY 54 R KPY 55 R KPY 56 R Offset voltage Symbol min. Limit Values typ. - 24.0 15.0 8.8 6.0 2.6 1.2 30 45 70 120 130 150 - max. 8 32.0 24.0 12.5 9.0 4.0 2.0 40 72 100 180 200 250 mV - 25 + 25 k mV/ Vbar 4 16.8 11.0 5.6 4.0 1.8 0.88 Unit
RB s
Vfin
21 33 45 80 90 110
mV
V0
P = P0
Semiconductor Group
2
KPY 51-R KPY 56-R
Electrical Characteristics (cont'd) at TA = 25 C and VIN = 5 V, unless otherwise specified. Parameter Linearity error (Best fit straight line) P0 = P0 ... PN KPY 51 ... 55 R KPY 56 R Pressure hysteresis P1 = P0, P2 = PN, P3 = P0 KPY 51 ... 56 R Symbol min. Limit Values typ. max. % Vfin - - 0.15 0.35 0.15 - 0.1 - % Vfin Unit
FL
PH
-
Electrical Characteristics at T1 = 25 C, T2 = 80 C, T3 = 25 C and VIN = 5 V, unless otherwise specified. Parameter Temperature coefficient of Vfin KPY 51 R KPY 52 R KPY 53 R KPY 54 R KPY 55 R KPY 56 R Temperature coefficient of V0 KPY 51 R KPY 52 R KPY 53 R KPY 54 R KPY 55 R KPY 56 R Temperature coefficient of RB KPY 51 ... 56 R Temperature hysteresis of V0; Vfin KPY 51 ... 56 R Symbol min. Limit Values typ. - - - - - - - - - - - - max. %/K - 0.20 - 0.20 - 0.20 - 0.20 - 0.20 - 0.20 - 0.09 - 0.12 - 0.13 - 0.14 - 0.15 - 0.15 %/K - 0.03 - 0.03 - 0.03 - 0.03 - 0.03 - 0.03 + 0.08 + 0.08 + 0.05 + 0.05 + 0.05 + 0.05 %/K - + 0.095 - % v. Vfin - 0.2 - Unit
TCVfin
TCV0
TCRB TH
Semiconductor Group
3
KPY 51-R KPY 56-R
Package Outline Stainless Steel Package
Weight 15.5 g
Dimension in mm
Exterior Packaging I.e. tubes, trays, boxes are shown in our Data Book "Package Information". Semiconductor Group 4


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